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MEMS device offers super sensitivity

April 24, 2018

April 24, 2018

Japanese multinational conglomerate company Hitachi, Ltd. announced that it has developed a new MEMS accelerometer that can detect vibrations up to three orders of magnitude smaller than previous designs that target automotive applications.

The new accelerometer mixes previous MEMS technology with circuit-based technology, resulting in an achieved sensitivity that compares to that of sensors used for oil and gas exploration but at a fraction of the power consumption. The high-sensitivity low-power MEMS accelerometer can detect vibrations as low as 30 ng/√Hz and only consume 20 mW, less than half the power usage of previous sensors.

The challenge that Hitachi faced was creating a sensor that was powerful enough to detect low-frequency vibrations without using a massive amount of power. Doing that is difficult because the power required for sensors increases exponentially as the noise floor is reduced.

MEMs_Accelerometer

Control IC, detection IC, and MEMS device in the accelerometer (left), moving mass inside the MEMS device (right). Image source: Hitachi.

Continue reading on Embedded's sister site, Electronic Products: "New high-sensitivity, low-power MEMS accelerometer detects super-weak vibrations."

 

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