STS wins order from Bosch for MEMs R&D etcher -

STS wins order from Bosch for MEMs R&D etcher


LONDON — Surface Technology Systems (STS) has received an order for a Pegasus deep reactive ion etch system from automotive MEMS device manufacturer, Robert Bosch and is the fifth order since Pegasus was launched at the end of June this year.

STS (Newport, Wales) is a developer of plasma process technologies for the growing MEMS and related markets and the Pegasus system will be installed at Bosch’s MEMS wafer fab in Reutlingen, Germany and will be used in a number of research and development projects to develop new MEMS devices.

STS believes its software which provides direct manual control of the equipment is well suited to the MEMS market, where device designs often differ significantly from one manufacturer to another. It has the capability to meet the demands of a wide range of customers – from ‘blue-sky’ researchers to high volume manufacturers such as Bosch.

Earlier this year STS strengthened its team at the German Sales Office in Ulm with the recent appointment of a Regional Customer Support Manager, who will work closely with customers in the region.

Mutsuo Mukuda, Vice Chairman of STS, said, “The order from Bosch for the Pegasus system is significant news for STS. Not only have we placed Pegasus with one of our largest and most prestigious European clients, but the sale also reinforces the belief that we have in Pegasus.”

Leave a Reply

This site uses Akismet to reduce spam. Learn how your comment data is processed.