CARDIFF, Wales MEMS equipment specialist, Surface Technology Systems (STS), is to supply Taiwan Semiconductor Manufacturing Company (TSMC), with a cassette to cassette high-rate ASEHRM plasma etch system. The system will be installed in an existing 150mm line at TSMC Fab 2 in Hsinchu, Taiwan.
STS systems are now installed in every MEMS foundry in Taiwan and the TSMC order increases the number of its systems in the country (for all applications) to over 35. STS says its local agent, Challentech International Corporation, as well as the presence of a locally-based STS service engineer were critical in gaining the order.
Mutsuo Mukuda, vice chairman of STS, said, “We see this order as evidence that MEMS manufacturing is a market assuming greater significance.”