LONDON Surface Technology Systems, a specialist in plasma process technologies required in the manufacturing and packaging of advanced electronic devices, has received multiple orders worth over £1million for its cluster tools from a leading supplier of components for wireless communications.
Over the past six years, STS (Newport, Wales) has installed a number of cluster tools at the customer’s production facility in North America. These tools have been supplied with inductively couple plasma (ICP) sources for etching via holes through GaAs wafers.
The recent orders include two cluster tools and additional process chambers for their existing equipment. One of these clusters will be a new VPX cluster based on Brooks’ MX400 robotic wafer handler, which can accommodate up to three individual process modules with STS’ latest generation of PLC-based control.
STS provides service support infrastructure in the U.S., controlled locally from its West Coast office in Redwood City, California.